State Key Laboratory of Radio Frequency Heterogeneous Integration (hereinafter referred to as the Laboratory) is led by Shenzhen University, and co-constructed by Shanghai Jiao Tong University and ZTE Corporation.

The main body of the laboratory is located in the Science and Technology Park Building on the Yuehai Campus of SZU, of which the ultra-clean experimental environment is about 2,000 square meters and the office area is about 10,000 square meters. The laboratory intends to purchase high-precision RF test systems, wafer bonding/unbonding systems, advanced packaging equipment, lithography systems, magnetron sputtering coating systems, chemical vapor deposition systems, atomic layer deposition systems, thin film heat treatment equipment, etching equipment, material/structure characterization equipment, etc., with a total value of equipment of about 300 million RMB.

State Key Laboratory of Radio Frequency Heterogeneous Integration (SZU) has put into use the following laboratories: Key Laboratory of Optoelectronic Devices and Systems of the Ministry of Education of China/Guangdong Province, Laboratory of Academician Mao Junfa's Team, and Optoelectronics Center. (1) The Key Laboratory of Optoelectronic Devices and Systems of the Ministry of Education/Guangdong Province has a total area of 8200 square meters, including 1,200 square meters of Class 100 and Class 10,000 purification laboratories; at the same time, it is equipped with a complete electronic-grade ultrapure water preparation system, a variety of special gases, such as delivery systems and other auxiliary facilities, with instrumentation and equipment valued at more than 200 million yuan; (2) the laboratory of Academician Mao Junfa's team is located in Canghai Campus on the 12th floor of the Zhi Zhen Building. With a floor area of 1520 square meters, the laboratory is constructing the international leading RF test conditions, which will form the complete capability of port test, on-chip test and air port test from material to chip, from device to system, and the main equipments include: 500 GHz network analyzer, 110 GHz signal generator and spectrometer, 256 GSa/s high sample rate oscilloscope, 500 GHz on-chip antenna measurement system, 110 GHz near- and far-field measurement system, and 100 GHz near- and far-field measurement system, which will be able to provide the best RF test conditions in the world. system, 110 GHz near and far field antenna test system and other advanced test equipment; (3) Optoelectronics Center is located in Shenzhen University Canghai Campus, Zhiteng Building, the negative floor, building area of 1,350 square meters, ultra-clean experimental environment of about 1,000 square meters. It has been equipped with large-scale equipment includingElectron Beam Lithography System, high-resolution electron beam imaging exposure machine, Wide broad spectral light excitation tester, Multi-chamber Vacuum Coating System, Scanning Electron Microscope, DEKTAK XT Stylus Profiler, with a total value of equipment of about 60 million RMB.

Efforts will be made to build the laboratory into an internationally advanced research and talent training base in the field of RF heterogeneous integrated circuits, to lead the frontier of the discipline and original innovation in the related fields, and to promote the development of China's integrated circuits to change lanes and overtake.