Equipment
High-Resolution Electron Beam Imaging Exposure Machine
Electron Beam Lithography System
Multi-chamber Vacuum Coating System
Wide broad spectral light excitation tester
Two photon polymerization 3D lithography machine
Two photon three-dimensional lithography machine
Deep Level Transient Spectroscopy
UV Mask Aligner
Optical Microscopy-NIKONECLIPSE LV150N
Copyright: Shenzhen University State Key Laboratory of Radio Frequency Heterogeneous Integration
