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Scanning Electron Microscope

Source:   Time:2023-07-05

INSTRUMENT INTRODUCTION

Brand: Phenom

Model No.: Phenom Pure+

Main specifications and technical parameters:

Magnification: Optical 20x; Electronic 65,000x (non-digital); Resolution: < 25 nm (BSD); Accelerating voltage: 5 kV - 10 kV continuously adjustable; Filament material: Long-life CeB6 filament; Evacuation time: < 15 s; Image format: JPEG, TIFF, BMP; Image resolution options: 456 x 456, 684 x 684, 1024 x 1024 and 2048 x 2048 pixels. 684, 1024 x 1024 and 2048 x 2048 pixels.

Main functions and features:

1, Full shape mode, 3D shape mode. 2, Optical navigation mode, electronic navigation mode. 3, Vacuum blocking technology in the electronic chamber with short waiting time.

Placement Location:

Optoelectronics Center, Shenzhen University, South Campus of SZU, the first phase of the Basic Experiment Building, negative 1 floor

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Copyright: Shenzhen University State Key Laboratory of Radio Frequency Heterogeneous Integration