Home > Equipment > Equipment > Content

Equipment

Home > Equipment > Equipment > Content

DEKTAK XT Stylus Profiler

Source:   Time:2023-07-05

INSTRUMENT INTRODUCTION

Model: DEKTAK XT Manual Table

Manufacturer: Bruker

Origin: Malaysia

Main specifications and technical parameters:

Scanning length: 50um-55mm, Measurement of the maximum drop (film thickness): 1mm, Taking point frequency table: 300 points per second, Probe force range: 1mg-15mg Maximum number of points: 120,000 (scanning time of 400s), The shortest point interval: 0.003um (scanning time and scanning length of the value of the same), Repeatability: Repeatedly measured 30 times the standard block, the statistical results of std value less than 4A.

Main functions and features:

Scanning to get the sample surface contour line, through the analysis can get the contour line on the different areas of the height of the fall (film thickness), roughness, stress, etc.

Placement Location:

Optoelectronics Center, Shenzhen University, South Campus of SZU, the first phase of the Basic Experiment Building, negative 1 floor

Share

Copyright: Shenzhen University State Key Laboratory of Radio Frequency Heterogeneous Integration